发明名称 |
SENSOR USABLE IN ULTRA PURE AND HIGHLY CORROSIVE ENVIRONMENTS |
摘要 |
A sensor operable at temperatures in excess of 400 DEG C is described. The sensor of the prevent invention operates without fluid fill, is non-porous, non-contaminating, and has no exterior exposed metallic components. The sensor includes a non-porous, impermeable sensing diaphragm that may be positioned in direct contact with fluids in an ultra-pure environment. The non-porous surface may be comprised of a layer of single crystal sapphire that is glassed to a backing plate. The sensor of the present invention is suitable for use in a chemically inert pressure transducer for sensing pressures and/or temperatures in process fluids and may be molded directly into the high temperature plastic housing of the pressure transducer module. |
申请公布号 |
WO0208713(A1) |
申请公布日期 |
2002.01.31 |
申请号 |
WO2001US22919 |
申请日期 |
2001.07.19 |
申请人 |
ENTEGRIS, INC. |
发明人 |
PETERSON, TOM;DIAZ DIAZ, JORGE, ANDRES;CUCCI, GERALD, R. |
分类号 |
G01K7/22;G01L9/00;G01L19/04;G01L19/06;H01L29/84;(IPC1-7):G01L19/04 |
主分类号 |
G01K7/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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