METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technique for manufacturing a high performance electrooptical device by using a plastic supporting body. SOLUTION: A first fixing substrate 101 and an element forming substrate 103 composed of a resin substrate are stuck together with a first adhesive layer and subsequently TFT(thin film transistor) elements and pixel electrodes are formed on the element forming substrate. A second fixing substrate 106 composed of the resin substrate is stuck thereon by a second adhesive layer 107 so as to hold a liquid crystal material 108 in between and the second adhesive layer 107 is removed and the first fixing substrate 101 is separated or released by making a YAG(yttrium aluminum garnet) laser beam irradiate the manufactured body in this state.