| 摘要 |
PROBLEM TO BE SOLVED: To provide a delivering apparatus which is composed of a pair of robots capable of directly delivering a thin plate-like product, such as photo masks, mask blanks, glass substrates and wafers from a robot hand of one robot to that of the other robot, and can substantially prevent the production of particles due to holding and transporting and adapt to a plurality of product sizes, and a method of directly delivering a thin plate-like product such as photo masks, mask blanks, glass substrates and wafers from the robot hand of one robot to that of the other robot. SOLUTION: The apparatus is composed of a pair of robots for directly delivering a thin plate-like product from a robot hand of one robot to that of the other robot in a clean room. For delivering the product, the two-dimensional shape in a product mounting region of each robot hand is a shape which is mutually fitted in the other robot hand two-dimensionally such as like a comb, key, etc. and a product receiving jig is provided on the product mounting region upside of each robot hand for holding the product thereon. |
