| 摘要 |
PROBLEM TO BE SOLVED: To provide a resonance frequency measurement device for a piezoelectric material that can accurately measure a resonance frequency of a piezoelectric material with a simple operation without being affected by a gap caused between the piezoelectric material and an electrode and to provide a foreign material eliminating device for a piezoelectric material that can obtain sufficient eliminating performance of a foreign material deposited on the surface of the piezoelectric material through a comparatively simple configuration. SOLUTION: While a blank B is placed between a couple of electrodes 11, 12 arranged opposite to each other, a high frequency signal is swept onto the blank B between the electrodes 11 and 12. A waveform detection circuit 4 detects a voltage waveform on the electrode 11, 12 in the case of applying the high frequency signal between the electrodes 11, 12. By recognizing the presence of a piezoelectric material resonance wave on the voltage waveform, whether or not the blank B is resonated, that is, whether or not the sweep frequency reaches the resonance frequency is discriminated so as to obtain the resonance frequency of the blank B. |
