| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin processing device which is capable of smoothly exhausting an air flow generated in a cup body by the rotation of a rotary table. SOLUTION: A spin processing device is equipped with a cup body 1, a rotary table 9 which is provided in the cup body 1 to be rotationally driven in the state of holding a substrate, inlets 5 which are provided to the circumferential wall of the cup body 1 so as to be arranged at prescribed intervals in the circumferential direction, an inlet path 21 which is provided with one end communicating with the inlet 5 and the other end blocked and located below the one end in the direction of rotation of the rotary table and where an air flow generated in the cup body 1 by the rotation of the rotary table and along the direction of rotation of the rotary table 1 is introduced through the inlet 5, and an exhaust vent 24 which is provided at the other end of the inlet path 21 and exhausts the air flow introduced into the inlet path 21 by the rotation of the rotary table.
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