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发明名称
EPITAXIE REAKTOR, SUSCEPTOR UND GASSTRÖMUNGSSYSTEM
摘要
申请公布号
DE69524563(D1)
申请公布日期
2002.01.24
申请号
DE19956024563
申请日期
1995.09.14
申请人
LPE S.P.A., OSPIATE DI BOLLATE
发明人
OGLIARI, VINCENZO;PRETI FRANCO, I-20133 MILANO;POZZETTI, VITTORIO
分类号
C30B25/10;C23C16/44;C23C16/458;C30B25/02;C30B25/12;C30B25/14;H01L21/205;(IPC1-7):C30B25/02
主分类号
C30B25/10
代理机构
代理人
主权项
地址
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