摘要 |
<p>A lens-line type piezoelectric device thinner than the manufacture limit thickness, which is conventionally difficult to manufacture, and a method for manufacturing the same. The piezoelectric device has a vibrating part of at least two steps where one side thereof is planar and the opposite side is thickest at the peripheral holding portion and thinner toward the central portion. A piezoelectric element of another mode has a vibrating portion of at least two steps where the peripheral holding portion is thickest on both sides and the thickness decreases toward the central portion. In these piezoelectric devices, at least at least one side of the thinnest central portion of the vibrating part has a convex lens shape. A pair of electrodes are vacuum deposited in the center these vibrating parts on both sides, and a gold wire is led as a lead wire from each electrode.</p> |