X-RAY ANALYZER PROVIDED WITH MULTILAYERED MIRROR AND INJECTION COLLIMATOR

摘要

PROBLEM TO BE SOLVED: To realize resolving power better than that obtained by a conventional apparatus. SOLUTION: The parallel radiation (12) emitted from the sample (4) in a known apparatus for X-ray analysis (e.g.; diffraction) is analyzed corresponding to a wavelength and matched with a focus 20 by a parabolic multilayered mirror 14. A collimator 28 is arranged in the vicinity of the focus. The resolving power of the apparatus is enhanced by making the angle passage width of the collimator smaller than the maximum rangeαmax of the angle of reflection of the apparatus. The resolving power of the apparatus is more excellently determined and the angle value of the passage width from each reflecting point (A or B) on the surface of the mirror is enhanced by introducing the injection collimator (28) so as to substancially depend on the position of the reflecting point. The injection collimator is formed in a shape of two mutually parallel knife edges arranged at different distances from the reflecting point of the multilayered mirror.