发明名称 ULTRAVIOLET RAY MEASURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an ultraviolet ray measuring method capable of precisely measuring the irradiation intensity of ultraviolet ray at a desired position of an article to be irradiated with ultraviolet ray. SOLUTION: This ultraviolet ray measuring method comprises sticking an ultraviolet ray measuring adhesive sheet 21 discoloring according to the irradiation intensity of ultraviolet ray to the desired position of the article to be irradiated with ultraviolet ray or a dummy equivalent to the article, irradiating it with ultraviolet ray, and measuring the irradiation intensity of ultraviolet ray on the basis of the degree of discoloration of the ultraviolet ray intensity measuring adhesive sheet 21.
申请公布号 JP2002022534(A) 申请公布日期 2002.01.23
申请号 JP20000210854 申请日期 2000.07.12
申请人 NITTO DENKO CORP 发明人 YAMAMOTO MASAYUKI
分类号 G01J1/02;G01J1/50;H01L21/301;(IPC1-7):G01J1/02 主分类号 G01J1/02
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