| 摘要 |
PROBLEM TO BE SOLVED: To enhance detection accuracy of angular speed. SOLUTION: The angular speed sensor comprises a tuning fork oscillator 21 composed of piezoelectric ceramic having a base 22 on which protruding fixing parts 22a, 22b are formed, and an exciting shaft 23 and a detecting shaft 24 standing oppositely on the base 22. As the polarizing direction of the exciting shaft 23, plane normal polarization is performed such that exciting electrodes 25a, 25c and 25b, 25d on the surface and rear of the exciting shaft 23 have opposite polarization directions. As the polarizing direction of the detecting shaft 24, plane normal polarization is performed such that detection electrodes 26a, 26c and 26d, 26f on the opposite sides on the surface and rear of the detecting shaft 24 have opposite polarization directions. Furthermore, in-plane polarization is performed such that central detection electrodes 26b, 26e on the surface and rear of the detecting shaft 24 have a zero potential with respect to the detection electrodes 26a, 26c, 26d and 26f. |
