| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic attracting plate, capable of easily detecting whether a flat plate electronic material, when electrostatically attracted and carried, is surely attracted or not and surely separating the material, if desired. SOLUTION: The electrostatic attracting plate to be used for attraction carrying means for, at least, the flat plate electronic material has a grooved or holed cavity in an effective attraction range, where at least an electrode is arranged, excluding a portion closely adhered to an attracted material.
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