| 摘要 |
An apparatus and method for locating light sensitive circuit design flaws on an integrated circuit chip comprises placing the integrated circuit chip on a load board, which is coupled electrically with a tester to supply operating power to the chip device. The current used by the chip device is continuously measured. A stereoscopic microscope is used to direct a spot of light through one of the eyepieces of the microscope onto the upper surface of the chip; and the spot of light is moved along a predetermined path to scan the surface of the chip. Through the other eyepiece of the microscope, the location of the spot of light is observed. When the measured current drain undergoes changes, as the spot of light impinges on the chip, the location is noted. The quadrant or other area of the chip, in which the change of current consumption occurred as a result of the spot of light, then is scanned a second time with a smaller spot of light; and the process is repeated. This is done as many times as possible to pinpoint a limited area of the chip which may contain the defect.
|
