Surface inspecting apparatus and method

摘要

A surface inspection apparatus comprising: a light source section for emitting a first luminous flux and a second luminous flux; a first irradiation optical system in which the first luminous flux is irradiated on the surface of an inspected object at a first irradiation angle; a second irradiation optical system in which the second luminous flux is irradiated on the surface of an inspected object at a second irradiation angle different from the first irradiation angle; a light receiving optical system for receiving scattered light of the first luminous flux irradiated by the first irradiation optical system and produced from an inspection object on the surface of an inspected object and scattered light of the second luminous flux irradiated by the second irradiation optical system and produced from an inspection object on the surface of an inspected object; a first light receiving section for converting the scattered light of the first luminous flux received by the light receiving optical system into a first light receiving signal; a second light receiving section for converting the scattered light of the second luminous flux received by the light receiving optical system into a second light receiving signal; a displacement section for relatively displacing an inspected object and an irradiation luminous flux of the irradiation optical system; and a discrimination section for discriminating the kind of an inspection object on an inspected object on the basis of the strength of the scattered light of the first and second light receiving signals, and the scattered range of the scattered light of the first and second light receiving signals.