| 摘要 |
PURPOSE: A sensor used for a pressure sensor, a flow sensor, an actuator accelerometer or the like is provided to be capable of testing periodically or continuously. CONSTITUTION: In order to provide a linear response in this example the parameter sensing signal is central around the 1 x 104 Hz range. As will be described below with reference to figure 6, the device of the invention has a varying response to excitation frequency, with several peaks. As mentioned above, in this example a sensing signal frequency is generally located in this case in the region of 1 x 104 Hz. This enables the device to be excited at a resonant frequency for example in the region of 1 x 105 Hz without effecting the sensing signal, but in a manner which is employed to determine the functionality of the device either on a continuous or intermittent basis. |
