发明名称 INSTALLATION FOR DISPENSING ULTRA-PURE GAS COMPRISING A PURIFYING UNIT
摘要 The invention concerns an installation for dispensing ultra-pure gas comprising a main purifying unit (22) installed between a gas supply intake (16) and an ultra-pure gas dispensing outlet (18), and a branch loop (28) mounted parallel to said main purifying unit (22). The branch loop (28) comprises an auxiliary purifying unit (30). The invention is useful for dispensing ultra-pure helium, or ultra-pure oxygen.
申请公布号 WO0152971(A3) 申请公布日期 2002.01.17
申请号 WO2001FR00128 申请日期 2001.01.16
申请人 L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE;GIRARD, JEAN-MARC;GARY, DANIEL 发明人 GIRARD, JEAN-MARC;GARY, DANIEL
分类号 B01D53/04;B01D53/74;F17C13/04;(IPC1-7):F17C13/04 主分类号 B01D53/04
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