| 摘要 |
PURPOSE: An LCD(Liquid Crystal Display) is provided to repair a short circuit between a source electrode and a gate electrode by removing a short-circuit part caused by conductive particles at an overlap part between the source electrode and the gate electrode. CONSTITUTION: An LCD consists of N numbers of gate lines(33a) and M numbers of data lines(43a) on a transparent substrate. The gate lines are formed by metal such as Al or Cu while the data lines are formed by metal such as Mo, Ti or Ta, or Mo ally including MoW, MoTa or MoNb. The gate lines and the data line are electrically insulated at each cross by a gate insulating film of SiNx or SiOx. N*M numbers pixels are formed in N*M numbers of pixel areas and switched by a TFT(Thin Film Transistor). The TFT includes a gate electrode(35a), source/drain electrodes(45), a semiconductor layer and an ohmic contact layer. The gate electrode is connected with the gate line, and the drain electrode is connected with the data line. The source electrode is formed corresponding to the drain electrode with the gate electrode therebetween. The source/drain electrodes are overlapped with both sides of an active layer by forming the ohmic contact layer. The source electrode is deposited on a photoresist film and exposed to beam. Thereby, the source electrode is multi-divided. If a short circuit between the source electrode and the gate electrode occurs, a part having conductive particles and the body of the source electrode are removed.
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