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发明名称
摘要
申请公布号	JP2002501671(A)	申请公布日期	2002.01.15
申请号	JP19980531042	申请日期	1998.01.08
申请人		发明人
分类号	F16L55/00;C23C16/44;C23C16/455;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/205;H01L21/306	主分类号	F16L55/00
代理机构		代理人
主权项
地址

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