INSPECTION METHOD OF SOLID IMAGING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an inspection method of a solid imaging device which can realize easily evaluation of high frequency characteristics in the solid imaging device without changing the frequency of the transfer pulses. SOLUTION: In a solid imaging device having a shift register and an output part with binary phase driving, this method keeps the constant phase difference between the polarity changes in transfer pulses in the shift register and the rest pulses, and changes the time-ratio between the high level and the low level in the transfer pulses, in both two transfer pulses applying to the shift register and the reset pulses to discharge the signals transferred to the output part.