摘要 |
<p>PROBLEM TO BE SOLVED: To provide a gas discharging apparatus which can remove easily and effectively the moisture contained in a gas. SOLUTION: The gas discharging apparatus has a container 1 and a gas refiner 4. A gas 2 circulates between the insides of the container 1 and the gas refiner 4 via duct lines 3a, 3b. In the container 1, a pair of discharging electrodes 8, 9 for causing a main discharge 10 in the gas 2 to emit a laser beam is provided. A portion of the wall portions of the gas refiner 4 is formed out of an electrochemical-element wall 14. By the electrochemical-element wall 14, the moisture contained in the gas 2 is so decomposed into hydrogen and oxygen as to exhaust the hydrogen or oxygen to the external and remove effectively the moisture contained in the gas 2 therefrom. Also, by the gas refiner 4, halogenides 11 and fine grains 12 contained in the gas 2 are removed therefrom.</p> |