发明名称 PHOTOSENSITIVE IC FREQUENCY CHARACTERISTIC SCREENING APPARATUS AND PHOTOSENSITIVE IC FREQUENCY CHARACTERISTIC SCREENING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive IC frequency characteristic screening apparatus for screening a photosensitive IC chip by measuring frequency characteristic of a circuit rapidly at a low cost, and a method thereof. SOLUTION: The photosensitive IC frequency characteristic screening apparatus screens a photosensitive IC chip according to frequency characteristic of a circuit. It comprises an AC light apparatus, which casts AC light on a photosensitive part of a photosensitive IC chip, and measuring equipment which measures output of a photosensitive IC.
申请公布号 JP2002009327(A) 申请公布日期 2002.01.11
申请号 JP20000185485 申请日期 2000.06.20
申请人 NEC CORP 发明人 NAGANO HIROKI
分类号 G01R31/26;G01J1/44;G01M11/00;G01R31/00;H01L27/14;H01L31/10;(IPC1-7):H01L31/10 主分类号 G01R31/26
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