发明名称 |
SPACE CHARGE NEUTRALIZATION OF AN ION BEAM |
摘要 |
A device is provided for treating a workpiece with positively charged ions. The device includes an apparatus including an ion source for producing a positive ion beam and directing the positive ion beam toward a surface of a work piece. The device further includes a source for introducing negative ions into the beam path in at least one selected region downstream of the ion source.
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申请公布号 |
US2002003208(A1) |
申请公布日期 |
2002.01.10 |
申请号 |
US19980083706D |
申请日期 |
1998.05.22 |
申请人 |
DUDNIKOV VADIM G. |
发明人 |
DUDNIKOV VADIM G. |
分类号 |
H01J37/08;C23C14/48;G21K1/14;H01J37/30;H01J37/317;H01L21/265;(IPC1-7):H01S1/00;H01S3/00;H05H3/02;G21K5/10 |
主分类号 |
H01J37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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