| 摘要 |
<p>An inspection apparatus and an inspection method for inspecting the shape of a substrate for liquid crystal panel efficiently with high precision. A computer (21) controls an X electrode selecting section (22) and an Y electrode selecting section (23) to drive liquid crystal electrodes on a substrate (100) selectively. A flash shock sensor (1) disposed oppositely to and in noncontact with the substrate (100) detects potential variation of the liquid crystal electrodes (101-104) and delivers it as a detection signal to the computer (21). Upon receiving the detection signal from the flash shock sensor (1), the computer (21) generates image data and open circuit, short circuit or blemishes of the liquid crystal electrodes is detected based on that image data. Furthermore, the computer (21) presents an image indicative of the shape of the liquid crystal electrodes on a display (21a).</p> |
