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发明名称
OBJECT CARRIER FOR A PARTICLE-OPTICAL APPARATUS
摘要
申请公布号
EP1169726(A1)
申请公布日期
2002.01.09
申请号
EP20010900438
申请日期
2001.01.12
申请人
FEI COMPANY
发明人
VISSCHER, ALBERT
分类号
H01J37/20;H01L21/00;H01L21/683;H01L21/687;(IPC1-7):H01J37/20
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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