APPARATUS FOR AND METHOD OF VACUUM VAPOR DEPOSITION AND ORGANIC ELECTROLUMINESCENT DEVICE

摘要

PURPOSE: Apparatus for and method of vacuum vapor deposition and organic electroluminescent device are provided to deposit the organic material at a high deposition rate to a uniform film thickness and at a high yield. CONSTITUTION: A vacuum vapor deposition apparatus comprises a vacuum chamber(1) having a plurality of vapor sources and a heater for heating the vapor sources to achieve vacuum vapor deposition on a surface of at least one substrate within the vacuum chamber, at least one of the vapor sources(2) utilizing an organic material, a hot wall(4) heated to a temperature at which the organic material is neither deposited nor decomposed, the hot wall enclosing a space in which the vapor sources and the substrate confront each other, and the organic material being vapor deposited on the surface of the substrate, by heating the vapor sources while the vapor sources and the substrate are moved relative to each other.