摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing an optical element which can stably maintain its designed optical performance for a long time without reduction in transmittance due to deterioration of the surface of quartz, without generation of deterioration of quartz due to irradiation of laser beams over a long time, without a change in the optical characteristics as an optical element, and to provide the optical element, an optical system using the optical element, an optical apparatus, and a method for producing a device and the device. SOLUTION: This method for producing the optical element is a method which includes a stage for processing high purity synthetic quartz glass by means of lithography, or a method wherein the above glass is subjected to a hydrogen containing treatment after being processed.
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