METHOD FOR SIMULATING MICROFABRICATION

摘要

PROBLEM TO BE SOLVED: To provide a method for simulating microfabrication which considers influence of defects in a medium and can correspond to a real processing medium. SOLUTION: The method for simulating microfabrication is provided with a two-dimensional pattern defining stage for defining a two-dimensional pattern for processing a processing layer of a flat medium, a defect defining stage in which N pieces (N is >=1) of three-dimensional close regions showing minute heterogeneous regions contained inside the flat medium are defined and material quality data and sufficient volume values as a material quality parameter are given to each region, a medium cell dividing stage in which respective layers of the flat medium are divided to three- dimensional medium cells having sizes of dx×dy×dz and all of three-dimensional medium cells are given with material quality data of respective layers and volume value of 100% as initial values, a defect cell mapping stage, a two-dimensional pattern mapping stage and a processing simulating stage containing a volume renewing stage for renewing sufficient volume value of three-dimensional medium cell arranged in a sectional direction by performing prescribed processing within a size range of dx×dy to the three-dimensional medium cell of the uppermost surface which is made to correspond thereto by the two-dimensional pattern mapping stage.