| 摘要 |
PROBLEM TO BE SOLVED: To prevent substrates from being injured or contaminated when loads or impacts are applied to the substrates, under conditions that a plurality of substrates storage trays are stacked or transported. SOLUTION: In the substrate storage tray 1 having a nearly square shape, a substrate storage part 2 is provided on the top side of the tray 1 to store a substrate 3, while on the bottom side of the tray, projecting parts 5 are provided on the outer periphery of the storage part 2, skirt parts 7 being provided along the outer periphery of the tray 1 so as to extend obliquely downward. The storage part 2 has steps 4, in contact with the underside outer periphery of the substrate, on the inner wall surface of the part 2. Recesses 8, each of which is recessed inwardly from the top end of the part 7 to the midpoint thereof, are provided on each of the skirt parts 7 in such a manner that when the skirt parts 7 are turned through an angle of 90 deg. or 180 deg. with respect to the center of the tray 1, the recesses 8 are located at asymmetrical points. |
