| 摘要 |
PROBLEM TO BE SOLVED: To enhance the rigidity of a z-axis stage, and move the stage in good balance. SOLUTION: In the z-axis stage mechanism 1 for adjusting the focus position of an objective lens which moves only in the direction of z-axis with respect to a base stand 2, a guide part 4 which is symmetrically arranged in reference to the center of gravity of the z-axis stage 3, and a mobile means 5 which changes the position of the z-axis stage 3, and a clamp means 6 which fixes the z-axis stage 3 at a prescribed position, are provided. Because the guide part 4 guides the z-axis stage 3 in the z-axis direction, high rigidity is exhibited, against an external force, and the z-axis stage travels in good balance. Accordingly, the workability at the time of adjusting is improved, and also the accuracy for adjustment is stabilized.
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