| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical measurement device which measures incident angle of parallel beam incident on a collimator lens as well as its incidence position. SOLUTION: An optical measurement device 1 emits a laser beam from a laser diode 2 into parallel beam L via a collimator lens 5, and then emits it toward a surface 7 which is to be inspected through a beam splitter 6. A return laser parallel beam Lr reflected on the surface 7 focuses on a light- receiving surface of a light receiving element 8 via the collimator lens 5, and the incidence angle of the return laser parallel beam Lr is measured, based on the focusing point. A center of gravity (reference position) P of the emerging laser parallel beam L is detected with a semiconductor position detecting element 9, and a center of gravity Pr of the return laser parallel beam Lr is detected with a semiconductor position detecting element 10. Based on these positions, deviation in incidence position of the return laser parallel beam Lr measured as well.
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