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发明名称
SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR
摘要
申请公布号
KR20020002390(A)
申请公布日期
2002.01.09
申请号
KR1020017010379
申请日期
2001.08.16
申请人
发明人
分类号
H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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