Two-dimensional sensor using LAPS for measuring cell activity

摘要

A two-dimensional sensor (1) is described including a substrate having a Si layer, a SiO2 layer and a Si3N4 layer. On the surface of the Si back side, a thin film is formed by vapor deposition for making an effect electrode. On the surface of the Si3N4 front side, a fence is attached for containing a sample cell (2), culture medium and a reference electrode. This sensor (1) is placed in an incubator (3) and a bias voltage is applied between the effect and reference electrodes. When a high frequency modulated laser beam irradiates a spot of the back side of the sensor substrate, a signal of AC photocurrent is obtained from the effect electrode. This signal corresponds to a potential alteration due to the cell activity substantially at the spot. The signal is processed in a computer (10). Therefore, the beam spot size and location, corresponding to the size and the location of the measurement electrode, can be adjusted easily by focusing or moving the laser beam.