| 摘要 |
PROBLEM TO BE SOLVED: To obtain a simple and compact optical measuring apparatus arranged such that accurate information concerning to the properties of an object to be inspected, i.e., a sample, can be obtained, especially for both structured and nonstructured wafers. SOLUTION: In order to couple an object light beam (10) and a reference light beam (9) with an evaluation unit (11), light guide units (23, 25) comprising a large number (N) of optical fibers (24, 26) are provided.
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