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发明名称
摘要
申请公布号
JP3244024(B2)
申请公布日期
2002.01.07
申请号
JP19970164688
申请日期
1997.06.20
申请人
发明人
分类号
H01L21/768;H01L21/312;H01L23/522;(IPC1-7):H01L21/312
主分类号
H01L21/768
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代理人
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