| 发明名称 |
Methods of fabricating articles and sputtering targets |
| 摘要 |
Described is a high quality sputtering target and method of manufacture which involves application of equal channel angular extrusion.
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| 申请公布号 |
US2001054457(A1) |
申请公布日期 |
2001.12.27 |
| 申请号 |
US20010912476 |
申请日期 |
2001.07.24 |
| 申请人 |
SEGAL VLADIMIR;WILLETT WILLIAM B.;FERRASSE STEPHANE |
发明人 |
SEGAL VLADIMIR;WILLETT WILLIAM B.;FERRASSE STEPHANE |
| 分类号 |
B21C23/00;B22D7/00;C22F1/00;C22F1/04;C23C14/34;(IPC1-7):C22C21/12 |
主分类号 |
B21C23/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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