| 摘要 |
PROBLEM TO BE SOLVED: To keep the measuring accuracy higher while simplifying the measurement of the radius of curvature. SOLUTION: The condensing point of light focused on a reference spherical surface is positioned at a point separated by a specified distance R0 along the optical axis of the reference spherical surface to the side of the center of curvature from the top of a measuring surface Aa of an spherical object A to be examined and under such a condition, with the interference between the light reflected on the reference spherical surface and the light reflected on the measuring surface Aa, an interference fringe generated is analyzed to obtain a correction-based shape data f (ΔR) and a virtual shape data f (R0) obtained by the conversion of the specified distance R0 as the radius of curvature is added to the correction-based shape data f(ΔR) to obtain an actual shape data f(R) of the measuring surface Aa. The radius of curvature R of the measuring surface Aa is obtained from the actual shape data f (R). This eliminates time and labor required for the alignment between the center of curvature of the reference spherical surface and the center O of curvature of the measuring surface Aa thereby maintaining the accuracy of measuring the curvature while simplifying the measurement.
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