摘要 |
PROBLEM TO BE SOLVED: To prevent an element from being damaged by shock or the like without suppressing vibration. SOLUTION: A number of elastic body projections are formed at the side of the piezoelectric ceramic element of a case or a substrate, and the projections are brought into contact with one another to support the element. A sheet having the elastic body projections may be arranged between the case or the substrate, and the element. Since distortion in a thickness direction can be suppressed to a fixed amount or less, damage can be prevented.
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