| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma generating device generating plasma at the atmospheric pressure in an atmosphere of only air without another specific gas, utilizing high frequency wave discharge like microwave, restraining power consumption, with stable life. SOLUTION: The plasma generating device comprises an oscillation means generating high frequency wave, a circuit means treating high frequency wave generated at the oscillation means, a transmission means transmitting the high frequency wave treated by the circuit means, and a plasma generation means generating plasma by using the high frequency wave transmitted by the transmission means. A plasma excitation member, forming a concentrated electric field between a resonance cavity in which, electric field component and magnetic field component of the transmitted high frequency wave is locked up by the plasma generation means, and electric field component of the high frequency wave generated in a cavity chamber as a cavity resonator, is vertically erected in the cavity chamber, and constructed by a copper rod with stainless screw at top end, and tungsten or metal plate as a copper rod arranged vertically to the copper rod at lower part of the top part of the copper rod. |
