发明名称 Article positioning apparatus and exposing apparatus having the article positioning apparatus
摘要 There is disclosed an article positioning apparatus for positioning an article composed of an electric conductive material over a predetermined base, the apparatus comprising: levitating means for levitating the article over the base; driving force generating means including current generating means for inducing a current in the article and magnetic field generating means for generating a magnetic field in a direction perpendicular to the current induced by the current generating means, and the driving force generating means being for generating a driving force composed of Lorentz force to the article in the direction perpendicular to the current and the magnetic field; and displacement detecting means for detecting a displacement of the article, wherein the article is positioned through the driving force generating means in accordance with a result detected by the displacement detecting means.
申请公布号 US6333572(B1) 申请公布日期 2001.12.25
申请号 US20000702887 申请日期 2000.11.01
申请人 NIKON CORPORATION 发明人 ONO KAZUYA
分类号 G03F7/20;G03F9/00;(IPC1-7):B65G49/07 主分类号 G03F7/20
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