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发明名称
METHOD FOR FORMING CONTACT HOLE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20010112754(A)
申请公布日期
2001.12.22
申请号
KR20000032959
申请日期
2000.06.15
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, YUN JAE;YOON, JAE MAN
分类号
H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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