| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive and application-specifically constituted semiconductor test system for testing semiconductor device, by making various different types of testing devices modules, combining a plurality of them, and providing a measuring module corresponding to a function peculiar to a device to be tested in a test fixture. SOLUTION: This semiconductor test system comprises two or more tester modules having the same or different kinds of performances, a system body including two or more tester modules by combination, a test fixture disposed on the system body for electrically connecting the tester modules with the tested device to be tested, a measuring module provided for the text fixture for exchanging a signal between the tester modules and the device to be tested according to a function of the tested device to be tested, and a host computer for controlling all operations of the system by communicating with the tester modules disposed on the test system via a system bus. |
