| 摘要 |
PROBLEM TO BE SOLVED: To form a multilayered heterostructure film over a large area. SOLUTION: Inorganic material layers X1 to X7 and organic material layers Y2 to Y6 are formed alternately on a glass substrate 10 to obtain the multilayered heterostructure film. The inorganic material layers X1 to X7 are formed by a sol-gel method to form solid metal oxide layers through the liquid, sol and gel phases carried out by dipping the substrate 10 coated with OH- groups through preliminary surface treatment in a metal alkoxide solution, treating in a rinsing bath and then subjecting to a hydrolysis process. The organic material layers Y2 to Y6 are formed in the layer-by-layer electrostatic self-assembly process by alternately dipping the substrate 10 in a positive electrolyte polymer solution and in a negative electrolyte polymer solution. By selecting the refractive index and thickness of each layer, the multilayered heterostructure film having desired optical characteristics can be formed, and this results in an optical reflection film, transmission film, optical resonator or the like.
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