| 摘要 |
PROBLEM TO BE SOLVED: To stably ionize a sample in exhaust gas with high efficiency, to transport the ion to a mass spectrometer with a high transmission factor and further to prevent intrusion of corrosive gas in the exhaust gas to improve the durability of the mass spectrometer. SOLUTION: A device for ionizing sample gas under the atmospheric pressure and measuring and analyzing components in the sample gas is provided with means 33, 34 for leading in the sample gas. At least one gas ionizing means 10 is provided on one face side of the means for leading in the sample gas, and an initial stage of a differential exhaust part comprising relatively low vacuum chambers 50, 60, 70 constituted stepwise to inject the ionized sample gas into a mass spectrometric part 80 disposed in a high vacuum region, is disposed on the other face side of the means 10 for leading in the sample gas. A mass spectrometric part 80 of high vacuum is disposed at the final stage part of the differential exhaust part of the low vacuum chamber.
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