| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer piezoelectric element in which the size is reduced while keeping high reliability and manufacturing cost is reduced. SOLUTION: A first layer of a material having electromechanical energy converting function and a second layer of an electrode material are laid alternately into a plurality of layers, and electrodes 3 constituting the plurality of second layers are divided into a plurality of groups. Electrodes corresponding to respective groups are energized through respective outer conductive films 4 at a first element part 1a, and a second element part 1b is arranged on one end side of the first element part 1a. The second element part 1b has a plurality of conductive films 6 for wiring provided between third layers having electromechanical energy converting function and conducting, respectively, with the plurality of outer conductive films, and a plurality of through holes 5 made in the outer layer of the third layer wherein the plurality of conductive films 6 are made conductive, respectively, with the plurality of through holes 5. |
