发明名称 JIG FOR MEASURING CURRENT OR VOLTAGE
摘要 PROBLEM TO BE SOLVED: To provide a jig for measuring a current or a voltage, without having to break an electronic component or the like on a substrate to be measured, requiring no working man-hours, when measuring the voltage or the current of an object (e.g. a semiconductor wafer) via a measuring substrate. SOLUTION: At a current measuring time, an input side insertion pin 31a is inserted and connected to an input side pin receiver 13, and an output side insertion pin 32a is inserted and connected to the output side pin receiver 14. In this state, a vertical plate 18 is pressed down by the output side insertion pin, and a receiving contact 15 and a pressure contact 16a become turned off. Accordingly, since the current passes an ammeter 121 as shown by a path K2, a current measurement can be conducted. A voltage measurement can be conducted, by inserting and connecting only the input side insertion pin and connecting the output side insertion pin to a ground line 21.
申请公布号 JP2001351955(A) 申请公布日期 2001.12.21
申请号 JP20000171053 申请日期 2000.06.07
申请人 SONY CORP 发明人 KADOMATSU HIDEKI
分类号 G01R1/067;G01R15/12;G01R19/00;H01L21/66;H01R13/71;H01R29/00;(IPC1-7):H01L21/66 主分类号 G01R1/067
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