SUBSTRATE HOLDER AND SUBSTRATE-MOUNTING METHOD USING IT

摘要

PROBLEM TO BE SOLVED: To efficiently and reliably fix a plurality of sub substrates to a substrate holder for fixing the plurality of sub substrates and to reliably fix the substrate holder onto a main substrate. SOLUTION: A substrate holder 10 is clamped and fixed onto a main substrate 20 with screws. Also, a plurality of sub substrates 30 are inserted into a plurality of slits 28 being formed on the substrate holder 10 for supporting. Further, a bolt 14 is inserted into bolt insertion holes (a substrate holder side bolt hole 34 and a sub substrate side bolt hole 40) being formed at the substrate holder 10 and the sub substrates 30, thus fixing the plurality of substrates 30 and the substrate holder 10.