发明名称 METHOD FOR MANUFACTURING CERAMIC SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic circuit substrate in which in increasing the density of the ceramic circuit substrate, a high density pattern by a thick film intaglio transfer method is formed as an inner packaging conductor. SOLUTION: In a method for forming a conductor pattern on an un-baked green sheet by use of a thick film intaglio transfer method, a heat-resistant substrate is coated with adhesives, and first the conductor pattern is tentatively transferred to the heat-resistant substrate, the un-baked green sheet is disposed adjacent to the intaglio-transferred conductor pattern of the heat-resistant substrate, and the conductor pattern is retransferred so as to cut into the unbaked green sheet in a heating and compressing process step. Thus, a thick film intaglio pattern can be formed on an unbaked ceramic GS. This is debindered and sintered, thereby manufacturing a ceramic circuit substrate in which a high performance conductor pattern by the thick film intaglio transfer method is formed as an inner packaging conductor.
申请公布号 JP2001352152(A) 申请公布日期 2001.12.21
申请号 JP20000170117 申请日期 2000.06.07
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HASHIMOTO AKIRA
分类号 H01L21/48;H01L21/68;H01L23/498;H01L23/538;H05K1/09;H05K3/20;H05K3/38;H05K3/46;(IPC1-7):H05K3/20 主分类号 H01L21/48
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