发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit device which obtains an inductor with a high Q-value, which suppresses eddy currents as an element which increases a coil resistance. SOLUTION: Firstly, a coil is divided into a plurality of coils. Consequently, local concentration of a magnetic field can be suppressed, and the coil resistance due to the eddy current can be reduced. Secondly, the coils are formed on different planes which are parallel to each other, and the resistivity of the coils themselves can be reduced. Although the two constitutions can be adopted independently of each other, the inductor having both constitutions can also be formed.
申请公布号 JP2001352040(A) 申请公布日期 2001.12.21
申请号 JP20000171496 申请日期 2000.06.08
申请人 TOSHIBA CORP 发明人 INOUE TETSUO
分类号 H01F17/00;H01L21/822;H01L27/04;(IPC1-7):H01L27/04 主分类号 H01F17/00
代理机构 代理人
主权项
地址