| 摘要 |
A method and corresponding apparatus for determining one or more physical parameters, such as electron density, of a target surface of a sample are disclosed. The target surface is irradiated with X-rays of at least two different wavelengths over a range of angles of incidence, and the physical parameter is determined by combining measurements of the intensity of these X-rays following specular reflection. The X-rays at two different wavelengths may be simultaneously generated using a metal alloy anode. |
