| 发明名称 |
METHOD AND APPARATUS FOR THE DETECTION OF SURFACE CHARACTERISTICS |
| 摘要 |
A method and apparatus for quickly detecting the surface characteristics of a surface, such as features, anomalies or contaminants are disclosed. The method and apparatus use heterogeneous condensation of a vapor on a surface and evaporation to reveal the surface characteristics of the surface and thereby enable the detection of such features.
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| 申请公布号 |
WO0196838(A1) |
申请公布日期 |
2001.12.20 |
| 申请号 |
WO2001US18966 |
申请日期 |
2001.06.12 |
| 申请人 |
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE;MAVLIEV, RASHID;WANG, HWA-CHI |
发明人 |
MAVLIEV, RASHID;WANG, HWA-CHI |
| 分类号 |
G01N15/02;G01N15/06;G01N21/94;G01N21/95;(IPC1-7):G01N21/95;G01B11/30;G01N21/88;G01N21/956 |
主分类号 |
G01N15/02 |
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