| 摘要 |
<p>An optical sensor that includes a light source (28) and a detector (30) is located within a cavity (14) in a polishing pad (10) so as to face the surface that is being polished. Light from the light source is reflected from the surface being polished and the reflected light is detected by the detector. The electrical signal produced by the detector is conducted to a hub (20) located at the central aperture (12) of the polishing pad. The disposable polishing pad is removably connected, both mechanically and electrically to the hub. The hub contains electronic circuitry (78, 58) that is concerned with supplying power to the optical sensor and with transmitting the electrical signal to a non-rotating station (26). Several techniques are described for accomplishing these tasks. The system permits continuous monitoring of an optical characteristic of a surface that is being polished, even while the polishing machine is in operation, and permits the end point of the polishing process to be determined.</p> |
